Password Retrieval
About Volant
Management
Services
Clients
Contact Information
Publications
Research Articles
Presentations
Patents
Resources
Society Links
Sampled Studies
Downloadable Files
Sensor Chronology
Research Articles
<B><FONT color=#53608c> Electronically-probed Measurements of MEMS Geometries (2000) </FONT></B> <BR>Raj K. Gupta, <a href="../_pdf/JMEMS0436JournalVersion.pdf">Downloadable pdf</a> <BR><BR><B>Abstract:</B><BR> Measurement of microelectromechanical systems (MEMS) geometry is critical for device design and simulation, for material property extraction, and for post-fabrication trimming. In this paper, electrostatically-driven laterally resonant comb-drive test structures with prescribed changes in spring width are used to ascertain systematic variations in process offsets (edge biases) and sidewall angles. The technique is both in-situ and non-destructive. An analytical model for the resonant frequency, tuned with three-dimensional (3D) simulations using MEMCAD, includes effects of a distributed mass, residual stress, and compliant supports. <P><B><FONT color=#53608c> Pull-in Time Dynamics as a Measure of Absolute Pressure (1997) </FONT></B> <BR>Raj K. Gupta and Stephen D. Senturia, <a href="../_pdf/MEMS97.pdf">Downloadable pdf</a> <BR><BR><B>Abstract:</B><BR> The squeezed-film damping component of the pull-in time of an electrostatically-actuated micromechanical fixed-fixed beam is shown to be a sensitive, and nearly linear function of ambient air pressure in the measured range of 0.1 mbar to 1013 mbar (1 atm or 760 Torr). The data and simulations show that pull-in type devices will enable MEMS sensors for broad-range absolute pressure measurements, and for in-situ leak monitoring of hermetically sealed packages containing other sensors or IC´s. The sensors are compatible with any MEMS fabrication processes that allow out-of-plane electrostatic actuation, including surface micromachining and silicon wafer-bonding, and they do not require a cavity sealed at vacuum or at a reference air pressure. <P><B><FONT color=#53608c> Additional research publications: </FONT></B> <ul type=square title="Additional Publications"> <li>"Electrostatic Pull-in Test Structure Design for <i>in-situ</i> Mechanical Property Measurements of Microelectromechanical Systems (MEMS)", MIT, 1997.<BR> <a href="../_pdf/MIT1997PhD.pdf">Downloadable pdf</a> <sub> </sub> <li>"The Effect of Release-Etch Holes on the Electromechanical Behavior of MEMS Structures", Transducers 1997, Chicago, IL. <sub> </sub> <li>"An Approach to Macromodeling of MEMS for Nonlinear Dynamic Simulation", ASME Congress and Exposition, Atlanta, GA, November 1996. <sub> </sub> <li>"Material Property Measurements of Micromechanical Polysilicon Beams", SPIE Micromachining & Microfabrication Conference, Austin, TX, October 1996.<BR> <a href="../_pdf/SPIE96.pdf">Downloadable pdf</a> <sub> </sub> <li>"Monitoring Plasma Over-etching of Wafer-bonded Microstructures", Proc. Transducers 1995, I, Stockholm.<BR> <a href="../_pdf/Trans95.pdf">Downloadable pdf</a> <sub> </sub> <li>"A Noise Study of a High-Tc Josephson Junction under Near-millimeter-wave Irradiation", Applied Physics Letters, <B>64</B>, February 14, 1994.<BR> <a href="../_pdf/APL64.7.927.pdf">Downloadable pdf</a> <sub> </sub> </ul>
Copyright © 2003-2011, Volant Technologies. All rights reserved.
